A thin film of Sb-doped Zn2SnO4 with spinel-type structure was deposit
ed on an alumina substrate by sputtering from multi-targets of constit
uent metals, followed by annealing at 1000 degrees C in air for 1 h. T
he film showed fairly good sensing characteristics to nitrogen dioxide
over the range from 0 to 300 ppm at 600 degrees C, though the interfe
rence by nitrogen monoxide and iso-butane was rather large. The durabi
lity of the film in a reductive atmosphere at 600 degrees C was proved
. The electrical resistance of the film was found to respond well to t
he total concentration of nitrogen oxides in an engine exhaust. (C) 19
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