EMISSION-SPECTRA OF INTERMEDIATE SPECIES FORMED IN RAREFIED FLAMES OFCHAIN OXIDATION REACTIONS OF MONOSILANE AND DICHLOROSILANE

In SiH4 oxidation under the conditions of glow discharge, the (SiH)-Si -. (A(1)Pi-X(1)Sigma(+)) radicals and SiH2+ (A(2)B(1)-X(2)A(1)) ions a re formed along with (SiH2)-Si-. species (A(1)B(1)-X(1)A(1)); the reac tion of SiH2Cl2 oxidation yields (SiCl2)-Si-. radicals (a(3)B(1)-X(1)A (1)) under the conditions of a rarefied flame and glow discharge. A de crease in the amount of SiO2 aerosol formed was observed at a constant electric field in the presence of SF6 additives. Emission spectra of SiH4 and (SiH2)-Si-. (A(1)B(1)-X(1)A(1)) oxidation in the rarefied fla me and glow discharge are registered with an electron-oscillating stru cture at 273 K and 2-115 ton: It is found that one of the main reactio ns of silylenes in rarefied flames is their interaction with O-2 resul ting in the SiO (A(1)Pi) formation. The bands in the emission spectra of both reactions at 425-530 nm are believed to belong to H2SiO ((1)A '-(1)A(1)). It is shown that, during SiH4 oxidation in the rarefied fl ame, the formation of (SiH2)-Si-. radicals (A(1)B(1)-X(1)A(1)) precede s the formation of hypothetical H2SiO species.