BUILT-IN ANALYTICAL MODULE FOR X-RAY PHOTOELECTRON-SPECTROSCOPY

An analytical module for X-ray photoelectron spectroscopy of surfaces is described. A technique for computer design of the module, which all ows its adaptation to specific conditions of operation as a component of technological cluster tools is considered. The module incorporates an intense X-ray source and quasiconical and cylindrical electron ener gy analyzers connected in series. Electrons are detected by an assembl y of microchannel plates. The analyzer energy resolution is 0.2%, with a luminosity of 4.8% of 4 pi. The sensitivity is about 0.01 of a mono atomic layer.