ACHIEVING UNIFORMITY IN A SEMICONDUCTOR FABRICATION PROCESS USING SPATIAL MODELING (VOL 93, PG 36, 1998)

Authors
HUGHESOLIVER JM LU JC DAVIS JC GYURCSIK RS
Citation
Jm. Hughesoliver et al., ACHIEVING UNIFORMITY IN A SEMICONDUCTOR FABRICATION PROCESS USING SPATIAL MODELING (VOL 93, PG 36, 1998), Journal of the American Statistical Association, 93(443), 1998, pp. 1252-1252
Citations number
1
Categorie Soggetti
Statistic & Probability","Statistic & Probability
Journal title
Journal of the American Statistical Association → ACNP
Volume
93
Issue
443
Year of publication
1998
Pages
1252 - 1252
Database
ISI
SICI code