We present a theoretical study of the performance of a novel device we
call the micromechanical tunneling transistor. The device is similar
in design to a micromachined electrostatic relay, but operates by cont
rolling the tunneling current across a nanometer sized gap. The term t
ransistor is used because the device uses an input voltage to control
the electron flow across a barrier. Unlike typical semiconductor devic
es, the current flow is controlled by the width of the barrier rather
than the height of the barrier.