THE TINI SHAPE-MEMORY ALLOY AND ITS APPLICATIONS FOR MEMS

The shape-memory effect is a solid state phenomenon which exploits a r eversible phase transformation to repeatedly achieve an initial shape, even after some deformation of the material. Numerous metal alloys ex hibit this effect. One of the most widely used shape-memory alloys is TiNi, due to its large range of recoverable deformations and its relat ive ease of processing. In bulk and wire form, TiNi has been applied t o a number of applications, and as a thin film, TiNi is an excellent m aterial for use as a microactuator in microelectromechanical systems ( MEMS), due to its large recovery forces and high recoverable strains. Several TiNi-actuated MEMS devices have already been reported.