PLASMA SENSOR MEASUREMENT IN PULSED PACVD-PLASMAS

In order to measure local plasma parameters as electron and ion densit y, electron and ion temperature or plasma potential of inert plasmas L angmuir sensors are used. In practical applications langmuir sensors s howed significant sensor signs when the sensor surface was modified by coatings or pollution [5-16]. This effect will be utilized to measure important coating plasma parameters. Putting the langmuir electrode t o the same coating conditions as the charge will offer information of the progress of the PACVD process. The use of the sensor should especi ally show events or conditions which conduct to local or generally bad technological coating properties. So in the early stages of coating d evelopment the quality can be recognized and possibly corrected or avo ided by variation of the process parameters. Sensor controled processi ng of PACVD-technic will lead to better coating quality and will incre ase the reproduceability.