X-ray microbeam techniques (spot size = 3 x 20 mu m(2)) have been appl
ied to characterize the composition and structure of rare earth activa
ted Gd(La, Sr) AlO3 phosphor thin films grown by combinatorial synthes
is. Using x-ray fluorescence, x-ray diffraction and near-edge x-ray ab
sorption spectroscopy, we have measured the chemical composition, crys
tallographic structure, and valence state of the rare earth activator
atom Eu. These measurements represent the direct application of x-ray
techniques to solid-state materials prepared by combinatorial synthesi
s and demonstrate the power of x-ray microbeam analysis to nondestruct
ively characterize as-grown combinatorial libraries. (C) 1998 American
Institute of Physics. [S0003-6951(98)03239-2].