MOLECULAR PHOTOPATTERNING WITH A 2-DIMENSIONAL NETWORK OF POLYMER LB FILMS

The preparation of preformed polymer Langmuir-Blodgett (LB) film which has a cross-linkable group and the formation of a two-dimensional net work polymer LB film by the efficient cross-linking reaction in the LB film were described. N-Dodecylacrylamide copolymer containing a cross -linkable group, N-omega-acryloylundecyl-4-vinylpyridinium salt, forms a stable condensed monolayer and can be transferred onto a silicon wa fer. On UV irradiation on the polymer LB film through a photomask in w hich fine patterns are figured, the fine patterns can be drawn clearly as the result of the formation of a two-dimensional network by effici ent cross-linking of the linear polymer chain in LB film. The characte rization of the LB film as a candidate of high-resolution resists was also investigated from the sensitivity measurement. (C) 1998 Elsevier Science S.A. All rights reserved.