CHARACTERIZATION OF BOLOMETERS BASED ON POLYCRYSTALLINE SILICON-GERMANIUM ALLOYS

Authors
SEDKY S FIORINI P CAYMAX M BAERT C HERMANS L MERTENS R
Citation
S. Sedky et al., CHARACTERIZATION OF BOLOMETERS BASED ON POLYCRYSTALLINE SILICON-GERMANIUM ALLOYS, IEEE electron device letters, 19(10), 1998, pp. 376-378
Citations number
13
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
IEEE electron device letters → ACNP
ISSN journal
07413106
Volume
19
Issue
10
Year of publication
1998
Pages
376 - 378
Database
ISI
SICI code
0741-3106(1998)19:10<376:COBBOP>2.0.ZU;2-J
Abstract
In this paper, we report on the first realization and characterization of uncooled Infra Red (IR) bolometers, based on polycrystalline alloy s of silicon and germanium (poly SiGe), Responsivity, thermal conducta nce, thermal time constant and noise will be analyzed. It sill be show n that poly SiGe provides high thermal insulation. An average detectiv ity of 10(8) cm root Hz/W has been measured. We expect that modificati ons in the device structure could allow to achieve detectivities of 10 (9) cm root Hz/W.