S. Sedky et al., CHARACTERIZATION OF BOLOMETERS BASED ON POLYCRYSTALLINE SILICON-GERMANIUM ALLOYS, IEEE electron device letters, 19(10), 1998, pp. 376-378
In this paper, we report on the first realization and characterization
of uncooled Infra Red (IR) bolometers, based on polycrystalline alloy
s of silicon and germanium (poly SiGe), Responsivity, thermal conducta
nce, thermal time constant and noise will be analyzed. It sill be show
n that poly SiGe provides high thermal insulation. An average detectiv
ity of 10(8) cm root Hz/W has been measured. We expect that modificati
ons in the device structure could allow to achieve detectivities of 10
(9) cm root Hz/W.