VACUUM GAUGES AND PARTIAL-PRESSURE ANALYZERS

Authors
TILFORD CR
Citation
Cr. Tilford, VACUUM GAUGES AND PARTIAL-PRESSURE ANALYZERS, Journal of physics. Condensed matter, 5, 1993, pp. 81-84
Citations number
25
Categorie Soggetti
Physics, Condensed Matter
Journal title
Journal of physics. Condensed matter → ACNP
ISSN journal
09538984
Volume
5
Year of publication
1993
Supplement
33A
Pages
81 - 84
Database
ISI
SICI code
0953-8984(1993)5:<81:VGAPA>2.0.ZU;2-Q
Abstract
This paper briefly reviews the characteristics of several important va cuum instruments; capacitance diaphragm gauges, ionization gauges, spi nning rotor gauges, and partial pressure or residual gas analysers.