STUDYING SURFACE-ROUGHNESS USING ANGLE-RESOLVED EELS

Citation
Gb. Hoflund et al., STUDYING SURFACE-ROUGHNESS USING ANGLE-RESOLVED EELS, Journal of physics. Condensed matter, 5, 1993, pp. 149-150
Citations number
8
Categorie Soggetti
Physics, Condensed Matter
ISSN journal
09538984
Volume
5
Year of publication
1993
Supplement
33A
Pages
149 - 150
Database
ISI
SICI code
0953-8984(1993)5:<149:SSUAE>2.0.ZU;2-G
Abstract
Angle-resolved electron energy loss spectroscopy (AREELS) has been use d to study Surface roughness induced at a polycrystalline Si surface b y ion bombardment. A surface plasmon peak which is sensitive to atomic disorder is present in the surface-sensitive (SS) AREELS spectrum, bu t as expected bulk-sensitive (BS) AREELS data are less sensitive to su rface disorder.