APPLICATIONS OF ION MICROSCOPY AND IN-SITU ELECTRON-MICROSCOPY TO THESTUDY OF ELECTRONIC MATERIALS AND DEVICES

We discuss the application of ion microscopy and in situ electron micr oscopy to the study of electronic and optical materials and devices. W e demonstrate how the combination of in situ transmission electron mic roscopy and focused ion beam microscopy provides new avenues for the s tudy for such structures, enabling extension of these techniques to th e study of dopant distributions, nanoscale stresses, three-dimensional structural and chemical reconstruction and real-time evolution of def ect microstructure. We also discuss in situ applications of thermal, m echanical, electrical, and optical stresses during transmission electr on microscopy imaging.