NUCLEATION AND GROWTH OF DIAMOND FILMS ON MU-C-SIC X-SI BY HOT-FILAMENT CVD

Using hot-filament CVD (HF-CVD) We succeeded in preparing polycrystall ine diamond films on non-scratched crystalline silicon by depositing a very thin microcrystalline silicon carbide buffer layer. Films were c haracterized by AES, EELS and SEM.