SWITCHING TIME OF PLANAR FERROELECTRIC CAPACITORS USING STRONTIUM-TITANATE AND BARIUM STRONTIUM-TITANATE FILMS

A microstripe cavity was used to make microwave (f similar to 10 GHz) measurements of the time of variation of the permittivity of SrTiO3 an d (Ba,Sr)TiO3 films exposed to unipolar video-frequency voltage pulses , It was shown that the permittivity of SrTiO3 films varies over times less than 30 ns. For (Ba,Sr)TiO3 films two characteristic times of va riation of the permittivity were identified: a fast variation over tim es less than 30 ns and a slower variation, on the order of 20 mu s. (C ) 1998 American Institute of Physics.