SCANNING FORCE MICROSCOPY INVESTIGATION OF ION-BOMBARDED INP

Authors
DEMANET CM
Citation
Cm. Demanet, SCANNING FORCE MICROSCOPY INVESTIGATION OF ION-BOMBARDED INP, Applied surface science, 135(1-4), 1998, pp. 53-58
Citations number
22
Categorie Soggetti
Physics, Applied","Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
135
Issue
1-4
Year of publication
1998
Pages
53 - 58
Database
ISI
SICI code
0169-4332(1998)135:1-4<53:SFMIOI>2.0.ZU;2-S
Abstract
Scanning force microscopy (SFM) was used to study the sputter cones re sulting from the 5 keV Ne+ bombardment of an InP (100) surface. Atomic force microscopy, force modulation microscopy (FMM) and phase detecti on microscopy (PDM) images allow to distinguish between sputter cones and substrate on the basis of topography, local elasticity, adhesion a nd viscoelastic properties. FMM and PDM clearly indicate that the sput ter cones' composition is different from that of the substrate. (C) 19 98 Elsevier Science B.V. All rights reserved.