ATOM AND CLUSTER BOMBARDMENT OF SOLIDS

Results from Molecular Dynamics calculations for atom and cluster bomb ardment of metal targets are discussed. Under keV atom bombardment, th e processes leading to cluster emission have been investigated and mec hanisms leading to emission of small and large clusters are proposed a s corroborated fi om the calculations. For cluster bombardment the mai n emphasis was on low energy bombardment and the question why cluster deposition can lead to films with properties different from those obta ined under atom bombardment.