INFRARED-SPECTROSCOPY OF SILICON-NITRIDE FORMATION UNDER ION SURFACE BOMBARDMENT

Authors
BACHURIN VI LEPSHIN PA SMIRNOV VK CURILOV AB
Citation
Vi. Bachurin et al., INFRARED-SPECTROSCOPY OF SILICON-NITRIDE FORMATION UNDER ION SURFACE BOMBARDMENT, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 62(4), 1998, pp. 703-709
Citations number
14
Categorie Soggetti
Physics
Journal title
Izvestia Akademii nauk SSSR. Seria fiziceskaa → ACNP
ISSN journal
03676765
Volume
62
Issue
4
Year of publication
1998
Pages
703 - 709
Database
ISI
SICI code
0367-6765(1998)62:4<703:IOSFUI>2.0.ZU;2-9