KINETIC-ANALYSIS OF THE C49-TO-C54 PHASE-TRANSFORMATION IN TISI2 THIN-FILMS BY IN-SITU OBSERVATION

The C49-to-C54 phase transformation of TiSi2 has been studied by in si tu observation using a transmission electron microscope (TEM) and by t hermal desorption spectroscopy (TDS). In situ TEM observation reveals that the interface of the transformation moves parallel to the Si subs trate. The results indicate that the transition is a diffusional trans formation that occurs via the short-distance diffusion of atoms, and i s not a diffusionless shear transformation. Through TDS study, H-2 is found to be desorbed during the transformation. The activation energy for the transformation is calculated to be 4.1 eV from the relationshi p between the desorption temperature and the heating rate of TDS, The phase transformation is thought to occur via lateral and massive growt h, and is not simply limited by the growth rate.