We report here the charge cloud shape produced by an X-ray photon insi
de the charge-coupled device (CCD) as well as a method to measure it.
The measurement is carried out by using a multi-pitch mesh which enabl
es us to specify the interaction position of X-rays with subpixel reso
lution not only for single events but also for split events. Split eve
nts are generated when the X-ray interaction position is close to the
pixel boundary. The width of this area depends on the apparent charge
size. Finally we measured the signal output from the pixel according t
o the interaction position of X-rays. By differentiating this function
, we obtain, in detail, the charge cloud shape which can be well repre
sented by an asymmetric Gaussian function. The charge cloud size for A
l-K X-rays is 0.7 x 1.4 mu m(2) while that for Mo-L X-rays is 0.8 x 1.
4 mu m(2). The size of the photoelectron in Si produced by these X-ray
s is about 0.04 mu m. Taking into account the mean absorption length f
or these X-rays in Si, diffusion process in the depletion region canno
t explain the charge cloud size. The asymmetry of the charge cloud pro
bably arises from the asymmetry of the electric field in the CCD.