Interference coatings based on synthesized silicon nitride

Authors
Lee, CC Chen, HL Hsu, JC Tien, CL
Citation
Cc. Lee et al., Interference coatings based on synthesized silicon nitride, APPL OPTICS, 38(10), 1999, pp. 2078-2082
Citations number
17
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
APPLIED OPTICS
ISSN journal
00036935 → ACNP
Volume
38
Issue
10
Year of publication
1999
Pages
2078 - 2082
Database
ISI
SICI code
0003-6935(19990401)38:10<2078:ICBOSS>2.0.ZU;2-2
Abstract
Silicon nitrides are synthesized by ion-assisted deposition with only one c oating material and a nitrogen- ion-beam source. All the SiNx films are amo rphous and mechanically strong. A wide range of refractive indices from 3.4 3 to 1.72 at a wavelength of 1550 nm is obtained. Near-IR antireflection co ating and a bandpass filter based on the multilayers of SiNx and Si are dem onstrated. (C) 1999 Optical Society of America.