Intelligent monitoring and control of semiconductor manufacturing equipment

Authors
Janet L.Murdock Barbara Hayes-Roth
Citation
Janet L.murdock et Barbara Hayes-roth, Intelligent monitoring and control of semiconductor manufacturing equipment, IEEE expert IEEE expert intelligent systems and their applications , 6(6), 1991, pp. 19-31
Journal title
IEEE expert IEEE expert intelligent systems and their applications → ACNP
ISSN journal
08859000
Volume
6
Issue
6
Year of publication
1991
Pages
19 - 31
Database
ACNP
SICI code