MOLECULAR-DYNAMICS SIMULATION OF THIN-FILM FORMATION BY ENERGETIC CLUSTER IMPACT(ECI)

Authors
HABERLAND H INSEPOV Z MOSELER M
Citation
H. Haberland et al., MOLECULAR-DYNAMICS SIMULATION OF THIN-FILM FORMATION BY ENERGETIC CLUSTER IMPACT(ECI), Zeitschrift fur Physik. D, Atoms, molecules and clusters, 26(1-4), 1993, pp. 229-231
Citations number
15
Categorie Soggetti
Physics, Atomic, Molecular & Chemical
Journal title
Zeitschrift fur Physik. D, Atoms, molecules and clusters → ACNP
ISSN journal
01787683
Volume
26
Issue
1-4
Year of publication
1993
Pages
229 - 231
Database
ISI
SICI code
0178-7683(1993)26:1-4<229:MSOTFB>2.0.ZU;2-5
Abstract
Langevin Molecular Dynamics Simulations have been performed in order t o understand thin film formation by impact of energetic clusters. The impact of Mo1024 clusters on a Mo surface is simulated at kinetic ener gies between 1 and 10 eV per atom. The results are in qualitative agre ement with the experiments. Due to the high temperature induced locall y at the impact zone, the method can be used to form compact, smooth, and strongly adhering thin films on room temperature substrates.