A review of buried oxide structures and SOI technologies

Authors
Leray, JL
Citation
Jl. Leray, A review of buried oxide structures and SOI technologies, INSTABILITIES IN SILICON DEVICES, VOL 3, 1999, pp. 145-231
Categorie Soggetti
Current Book Contents
Journal title
INSTABILITIES IN SILICON DEVICES, VOL 3 → ACNP
Year of publication
1999
Pages
145 - 231
Database
ISI
SICI code