The study of thermal nitridation and reoxidation mechanisms using isotopictracing methods

Authors
Ganem, JJ Baumvol, JJR
Citation
Jj. Ganem et Jjr. Baumvol, The study of thermal nitridation and reoxidation mechanisms using isotopictracing methods, INSTABILITIES IN SILICON DEVICES, VOL 3, 1999, pp. 495-520
Categorie Soggetti
Current Book Contents
Journal title
INSTABILITIES IN SILICON DEVICES, VOL 3 → ACNP
Year of publication
1999
Pages
495 - 520
Database
ISI
SICI code