Influence of long-range lateral ordering in structures with quantum dots on the spatial distribution of diffracted X-ray radiation

Perfectly crystalline (InAs-GaAs) multilayer periodic structures on (001) G aAs, which contain InAs quantum dots (QDs). have been studied by high-resol ution X-ray diffraction. It has been shown that the existence of such scatt ering objects as QDs strongly influences X-ray diffraction, changing the sp atial distribution of scattered radiation. Additional long-range ordering i n layers containing QDs results in unusual and significant elongation of su perlattice and substrate reflections in the q(x) direction. A novel qualita tive model of scattering layers consisting of perfect InAs and GaAs coheren t clusters has been developed.