Authors
Citation
St. Ryan, Vibration control confronts cleanroom standards, LASER FOC W, 35(4), 1999, pp. 125
Categorie Soggetti
Optics & Acoustics
Journal title
LASER FOCUS WORLD
ISSN journal
10438092
→ ACNP
Volume
35
Issue
4
Year of publication
1999
Database
ISI
SICI code
1043-8092(199904)35:4<125:VCCCS>2.0.ZU;2-F
Abstract
Optical tops evolve to offer cleaner structures for sensitive applications
such as atomic force microscopes.