Three-dimensional off-lattice model for the interface growth of polycrystalline materials

A three-dimensional off-lattice model is developed to explain the interface evolution of polycrystalline materials grown under surface reaction contro l. The model includes random deposition and surface diffusion of depositing particles with energy barriers located at step edges and crystal boundarie s. Depending on the height of the barriers existing at step edges and cryst al boundaries, this model predicts either a scale-dependent or a scale-inde pendent value of the growth exponent (beta). Scale-dependent values of beta reported for polycrystalline films grown under surface reaction control ca n be explained by the proposed model. [S0163-1829(99)02708-3].