Analysis of the complex response of a heterodyne differential interferometer to a microstep profile

Authors
Baranov, DV Egorov, AA Zolotov, EM
Citation
Dv. Baranov et al., Analysis of the complex response of a heterodyne differential interferometer to a microstep profile, QUANTUM EL, 29(1), 1999, pp. 69-72
Citations number
7
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
QUANTUM ELECTRONICS
ISSN journal
10637818 → ACNP
Volume
29
Issue
1
Year of publication
1999
Pages
69 - 72
Database
ISI
SICI code
1063-7818(199901)29:1<69:AOTCRO>2.0.ZU;2-#
Abstract
A fast method for determination of the parameters (height and widths) of a microstep profile was developed. The method is based on a comparison of com plex model responses with those obtained experimentally. A superresolution was achieved in determination of the lateral parameters of an object when a priori information on its shape was used.