Ion-induced sputtering of a metal in the form of large clusters

A model is proposed for the ion-induced sputtering of a metal in the form o f large clusters with a number of atoms N greater than or equal to 5. The m odel is based on simple physical assumptions and is consistent with experim ent. As an example, calculations are made of the relative cluster yield as a function of the number of atoms in the cluster as a result of the bombard ment of various metals by singly charged 5 keV argon ions. A comparison is made with experimental data. (C) 1999 American Institute of Physics. [S1063 -7842(99)01103-4].