Atomic force tunneling microscope and its application to the study of dielectric breakdown of a diamond film on silicon

A simple design is proposed for an atomic force microscope where the force of interaction between the tip and the surface of the sample is recorded di rectly using the piezoceramic of an XYZ-manipulator. The force signal is us ed as a feedback signal to keep the gap between the tip and the surface con stant, and its electrical conductivity is recorded at the same time. Result s of modifying the electrical conductivity of a thin diamond film after ele ctrical breakdown are presented. (C) 1999 American Institute of Physics. [S 1063-7850(99)01503-7].