Infrared linear arrays with 256 pixels based on lithium tantalate

Pyroelectric linear arrays are used for temperature measurement of linens d istributions and thermal imaging.. The applications make high demands on th e thermal and spatial resolution of the detector This performance can be ac hieved using very thin responsive elements with a small pitch which are iso lated thermally. The paper describes linear arrays based on lithium tantalate with 256 sensi tive elements of a pixel area of 40 x 50 mu m(2) each and a centre-to-centr e spacing of 50 mu m The possibilities to increase the resolution and the t echnological production process of the sensor chips will be discussed The m easured properties of the developed linear arrays are compared with results of simulation.