IMPROVED PREPARATION PROCEDURE AND PROPERTIES FOR A MULTILAYER PIEZOELECTRIC THICK-FILM ACTUATOR

Low-voltage multilayer piezoelectric lead zirconate titanate (PZT) bas ed thick-film displacement actuators were fabricated on Al2O3 ceramic substrate using a multiple screen-printing process. High isostatic pre ssure was applied on the multilayer green film before firing to increa se the material density and the bonding strength between electrode lay er and piezoelectric layer. It was demonstrated that the feasibility f or producing multilayer actuators on the substrate was significantly i mproved with the compression process introduced and the ferroelectric and piezoelectric properties of the final actuator samples were greatl y improved as well. (C) 1998 Elsevier Science S.A. All rights reserved .