MASS-PRODUCIBLE MONOLITHIC SILICON PROBES FOR SCANNING PROBE MICROSCOPES

In this paper, we describe the design, fabrication, and testing of mon olithically micromachined silicon probes for scanning probe microscope (SPM) applications. An SPM probe consists of three parts: an atomical ly sharp tip, a supporting flexural beam, and a handle. Unique design and fabrication processes allow probes with uniform geometry to be dev eloped efficiently. The process is robust, as no time-critical steps a re involved. Tips are formed by anisotropic etching followed by oxidat ion sharpening. Monolithic process enhances reliability of the probe b y eliminating post-fabrication assembly steps such as wafer bonding. W e have demonstrated SPM probes with excellent mechanical characteristi cs, including high resonant frequency and zero intrinsic bending. (C) 1998 Published by Elsevier Science S.A. All rights reserved.