In this paper we review the achievements in the field of silicon cryst
alline thin film solar cells and correlate these with the different ty
pes of growth techniques and substrates. As a starting point we discus
s the characteristics of photovoltaic devices based on the use of high
ly doped monocrystalline substrates as mechanical carriers for the thi
n films. These films are epitaxially deposited from the gas (CVD) or l
iquid phase (LPE). The comparison of both techniques is extended to gr
owth on defective silicon substrates, i.e., multicrystalline wafers or
silicon ribbons. The intrinsic grain boundary recombination activity
in the thin films is assessed as a function of the deposition techniqu
e. Bulk passivation by hydrogenation considerably improves the recombi
nation properties. The optimization of the hydrogen passivation condit
ions is looked at in conjunction with the used surface passivation pro
cess, This review is completed with the approaches to realize thin fil
m cells on nonsilicon substrates, including recrystallization in solid
and liquid phases.