LOW-ENERGY-ELECTRON SCATTERING FROM BCL3

Despite the importance of BCl3 in plasmas used for commercial etching processes, no calculations or measurements of elastic low-energy elect ron scattering from BCl3 have previously appeared in the literature. W e therefore present calculations based on the complex Kohn method for elastic electron-BCl3 scattering at incident electron energies below 8 eV. We find a near-zero-energy virtual state and a sharp temporary ne gative-ion resonance at 0.25 eV, which likely contributes to the large electron attachment cross sections observed in swarm studies. [S1050- 2947(98)03410-6].