We have fabricated Sm-Ba-Cu-O thin films at 550-850-degrees-C and at o
xygen pressures of 1.2-6.0 x 10(-5) mbar in the presence of ozone. Var
ious groups have reported on the existence of a solid solubility regio
n in bulk Sm1+xBa2-xCu3Oy made at atmospheric oxygen pressure and 975-
degrees-C. For these conditions, the superconducting transition temper
ature, T(c), is known to drop to zero as x is increased from 0 to 0.5.
In contrast, we find hardly any decrease of T(c) in our films in the
range 0<x<1 and 750-degrees-C < T(growth) < 800-degrees-C, with T(c)'s
about 90 K, from which we conclude that the solid solubility is stron
gly reduced or absent at low oxygen/ozone pressure in this growth temp
erature range. For this range of composition and growth temperature, w
e also observe no change in the c-axis lattice constant. The growth te
mperature that is needed to obtain a film with T(c,0) above 80 K equal
s 750-degrees-C, which is roughly 100-degrees-C higher than in the cas
e of Y-Ba-Cu-0 films grown under comparable conditions. These results
are discussed using thermodynamic equilibrium data of RE1+xBa2Cu3Oy (R
E=Y, Sm, La). At low temperature on a SrTiO3 substrate we observe an I
-centered cubic phase.