LASER REFLECTION MEASUREMENTS FOR END-POINT DETECTION AND ANALYSIS INNB AL2O3-AL/NB JOSEPHSON CIRCUIT FABRICATION/

Authors
DOLATA R NEUHAUS M JUTZI W
Citation
R. Dolata et al., LASER REFLECTION MEASUREMENTS FOR END-POINT DETECTION AND ANALYSIS INNB AL2O3-AL/NB JOSEPHSON CIRCUIT FABRICATION/, Physica. C, Superconductivity, 214(3-4), 1993, pp. 365-370
Citations number
21
Categorie Soggetti
Physics, Applied
Journal title
Physica. C, Superconductivity → ACNP
ISSN journal
09214534
Volume
214
Issue
3-4
Year of publication
1993
Pages
365 - 370
Database
ISI
SICI code
0921-4534(1993)214:3-4<365:LRMFED>2.0.ZU;2-A
Abstract
A simple optical reflection measurement arrangement is described which allows one to monitor the reflectivity of etched layers. The applicat ion of this method for end point detection in fabricating Josephson ci rcuits based on Nb/Al2O3-Al/Nb trilayers is presented. Moreover, the t hin intermediate Al layer can be examined by reflection analysis durin g etching of the complete trilayer. The application of reflectivity me asurements to the fabrication of vertically stacked Josephson devices is discussed.