A compact single-electron memory cell has been fabricated in silicon u
sing a process that is compatible with complementary metal-oxide-semic
onductor circuit fabrication. The device is based on the Coulomb block
ade effect observed in highly doped silicon nanowires. The circuit sho
ws clear memory operation with a >100 mV gap between ''0'' and ''1'' l
evels when tested at a temperature of 4.2 K. The response of the circu
it to write and erase pulse sequences is also presented. (C) 1998 Amer
ican Institute of Physics. [S0003-6951(98)02041-5].