ON THE CORRELATION BETWEEN THE CARBON CONTENT AND THE ELECTRICAL QUALITY OF THERMALLY GROWN OXIDES ON P-TYPE 6H-SILICON CARBIDE

Thermal oxides on p-type silicon carbide exhibit high densities of int erface states and fixed charge. Understanding the effect of the oxide composition on the electrical properties is imperative to improve the quality of oxides on p-type silicon carbide. In this work, we use angl e resolved x-ray photoelectron spectroscopy to profile the oxide compo sition. The result is a direct correlation between the carbon content in the oxide and the density of interface states and fixed charge as d etermined by electrical capacitance-voltage measurements. (C) 1998 Ame rican Institute of Physics. [S0003-6951(98)01641-6].