G. Percin et al., CONTROLLED INK-JET PRINTING AND DEPOSITION OF ORGANIC POLYMERS AND SOLID PARTICLES, Applied physics letters, 73(16), 1998, pp. 2375-2377
In this letter, we present a technique for the deposition of inks, org
anic polymers and solid particles, using a fluid ejector. The ejector
design is based on a flextensional transducer that excites axisymmetri
c resonant modes in a clamped circular membrane. It is constructed by
bonding a thin piezoelectric annular ring to a thin, edge supported, c
ircular membrane. Liquids or solid particles are placed behind one fac
e of the membrane which has a small orifice (50-200 mu m diam) at its
center. mm By applying an ac signal across the piezoelectric element,
continuous or drop-on-demand ejection of photoresist (Shipley Micropos
it S1400-21, S1400-27, S1805, and S1813), oil-based ink, water, or tal
cum powder [Mg3Si4O10(OH)(2)] has been achieved. Successful deposition
of photoresist has been accomplished without spinning, and thus witho
ut waste. Patterning of 10 mu m features, by baking, exposure, and dev
eloping, has revealed no defects in the deposition process. A boundary
integral method was used to numerically simulate drop formation from
the vibrating orifice. Simulations have been used to optimize ejection
performance. (C) 1998 American Institute of Physics. [S0003-6951(98)0
1442-9].