MICROSTRUCTURING OF MOLECULARLY THIN POLYMER LAYERS BY PHOTOLITHOGRAPHY

Citation
O. Prucker et al., MICROSTRUCTURING OF MOLECULARLY THIN POLYMER LAYERS BY PHOTOLITHOGRAPHY, Advanced materials, 10(14), 1998, pp. 1073
Citations number
28
Categorie Soggetti
Material Science
Journal title
ISSN journal
09359648
Volume
10
Issue
14
Year of publication
1998
Database
ISI
SICI code
0935-9648(1998)10:14<1073:MOMTPL>2.0.ZU;2-E
Abstract
Communication: Laterally structured ultrathin polymer films attached t o solid surfaces can be obtained using photolithographic techniques de veloped for electronic device fabrication. The Figure shows a surface plasmon (SP) microscopy image of a structured polystyrene (PS) film of 21.5 nm thickness prepared by photopolymerization. The authors report a strong adhesion of the polymer films to the substrate due to covale nt linking.