ASSEMBLY AND ANALYSIS OF QUANTUM DEVICES USING SPM BASED METHODS

Citation
L. Montelius et al., ASSEMBLY AND ANALYSIS OF QUANTUM DEVICES USING SPM BASED METHODS, Microelectronics and reliability, 38(6-8), 1998, pp. 943-950
Citations number
27
Categorie Soggetti
Engineering, Eletrical & Electronic
ISSN journal
00262714
Volume
38
Issue
6-8
Year of publication
1998
Pages
943 - 950
Database
ISI
SICI code
0026-2714(1998)38:6-8<943:AAAOQD>2.0.ZU;2-L
Abstract
Presently, there is a rapid growing interest in quantum devices based on single-electron-tunneling (SET)-effects. Such SET-devices are possi ble candidates for single electron memories that might allow room temp erature operation. The focus of possible room temperature SET-devices is towards fabrication of lateral tunnel structures. We have during th e last years developed a new way to fabricate lateral quantum devices. The principle is based on the use of the atomic force microscope (AFM ) for very accurate movement of pre-fabricated nano-objects into a sma ll gap between two metal electrodes. In! this way a unique technique t o build extremely small scale and accurate structures for contacting o f nano-objects is realized, making hitherto unachievable devices to be formed. (C) 1998 Elsevier Science Ltd. All rights reserved.