Using Fourier transform infrared-attenuated total reflectance spectros
copy in conjunction with hydrogen adsorption to probe surface layer co
mposition, we observe a reversible place exchange between Ge and Si on
Ge-covered Si(001) when the surface is dosed with atomic H at elevate
d temperatures. First-principles calculations confirm a thermodynamic
driving force for this place exchange. To explain the intriguing kinet
ics of the place exchange, which shows no time dependence, we propose
a dimer-vacancy diffusion-assisted mechanism limited by vacancy intera
ctions. [S0031-9007(98)07429-8].