We report a detailed study of the morphology of pits formed by corrosi
on of aluminum thin films using an in-plane light scattering technique
. We show that the corrosion front of the Al thin film can be treated
as a quasi-two-level random rough surface. Based on an elastic diffrac
tion theory, we are able to determine the average depth, the area, and
the density of pits, as well as the fractal dimension of the surface.
Using the advantages of light scattering, one can quantify the morpho
logical parameters of corroded films in situ and nondestructively. (C)
1998 American Institute of Physics. [S0003-6951(98)02743-0].