A CONVENIENT AND PRACTICAL PROCEDURE TO DERIVE CORRECTION FACTORS TO ESTIMATE ATOMIC RATIOS BY XPS

In quantitative XPS, the preparation of reference samples is difficult or impossible, and the correction factor method has been employed. Th erefore, a convenient and practical procedure to get correction factor s to estimate atomic ratios is proposed, in which it is assumed that t he XPS intensity distribution corresponds to the distribution of the p hotoionization cross section. This procedure can be applied to some in struments and various samples without the previous collection, prepara tion of reference sample groups, and determination of sensitivity fact ors for each element.