CONTROL OF THE MICROSTRUCTURE OF (PB,LA)TIO3 THIN-FILMS BY METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION USING A SOLID DELIVERY SYSTEM FOR FERROELECTRIC DOMAIN MEMORY

A model illustrating the fact that ferroelectric films with uniform gr ain size and columnar structure will exibit a suitable domain configur ation for ferroelectric domain recording storage media is proposed. To verify this mode], (Pb,La)TiO3 thin films are deposited by metal-orga nic chemical vapor deposition by a solid delivery technique to grow fi lms with a columnar structure and granular structure. A slow source in put rate results in a film with a columnar. structure whereas a fast i nput I-ate produces a film with a granular structure. The film with a columnar structure exhibits a more adequate domain configuration as co nfirmed by electrostatic force microscope observation, and also exhibi ts a very stable write/read operation for the domain memory applicatio n.