M. Kobune et al., RELATIONSHIP BETWEEN PYROELECTRIC PROPERTIES AND ELECTRODE SIZES IN (PB,LA)(ZR,TI)O-3 (PLZT) THIN-FILMS, JPN J A P 1, 37(9B), 1998, pp. 5154-5157
Highly c-axis-oriented PLZT films with compositions of (Pb0.925La0.075
)(ZryTi1-y)(0.981)O-3, where y = 0.2-0.4, were deposited on Pt(100)/Mg
O(100) by the rf-magnetron sputtering, applying an intermittent deposi
tion comprised of the repetition of deposition and nondeposition. It w
as confirmed that the highest figures of merit, EM. and F.M.D for the
pyroelectric IR sensors were obtained by using powders with excess Pb
O of 20 mol% added to PLZT, as sputtering targets in the preliminary e
xperiment. The PLZT film with y = 0.2 exhibited the highest EM. for vo
ltage responsivity Rv of approximately 5.3 x 10(-13) C . m/J among the
three samples studied, which was around 1.8 times larger than that of
PLZT ceramic with y = 0.2. The top-electrode sizes of around 500 and
250 mu m diameters were suitable for the measurement of pyroelectric p
roperties, judging from the characteristics of the materials and the a
ccuracy of the measuring instruments.