Si. Gheyas et al., CHEMISORPTION OF DEUTERIUM ON AN ULTRATHIN GE FILM DEPOSITED OVER SI(100)-2X1 - EXISTENCE OF A DIDEUTERIDE PHASE, Physical review. B, Condensed matter, 58(15), 1998, pp. 9949-9954
Adsorption of atomic deuterium on ultrathin Ge film deposited over Si(
100) has been studied using Fourier-transformed infrared reflection ab
sorption spectroscopy and reflection high-energy electron diffraction
(RHEED) measurements. We established that high atomic deuterium exposu
re of a Ge/Si(100) surface leads to a change in the RHEED pattern from
2x1 to 1x1. This change possibly is due to an overwhelming conversion
of Ge monodeuterides to dideuterides. Etching of the Ge atoms by deut
erium atoms has also clearly been observed. [S0163-1829(98)04539-1].