MICROWAVE EXCITATION AND APPLICATIONS OF AN ELLIPTIC EXCIMER LAMP

The concept and experimental results of a microwave-excited elliptical excimer lamp are presented in this paper. The plasma excimer photons are excited at one focus, and the absorber is placed at the second foc us. Two elliptical microwave, cavities with different eccentricities w ere tested to study the excitation and characteristics of such an elli ptical excimer lamp. The results show that it can be a high-efficiency , narrow-band incoherent vacuum-ultraviolet (VUV)-to-near-infrared pho ton source. The potential applications of such an excimer lamp, especi ally with tunable vibronic solid-state and diamond thin film growth, a re discussed.